System and Method for Reviewing a Curved Sample Edge

摘要

The disclosure is directed to a system and method for reviewing a curved edge of a sample. A line scan detector is actuated along an actuation path defined by the edge of the sample to scan a plurality of locations along the sample edge. The scan data is assembled to generate at least one review image of at least a portion of the edge of the sample. In some embodiments a substantially normal angle of incidence is maintained between the sample edge and the scanning illumination. In some embodiments, brightfield and darkfield images may be collected utilizing a common objective with separately operable illumination sources directing illumination along a first and second illumination path to the sample edge for review.

主权项

1. A system for reviewing a curved edge of a sample, comprising:
a stage configured to support a sample; at least one illumination source configured to illuminate an edge of the sample with illumination emanating from the at least one illumination source along an illumination path including one or more illumination optics; a line scan detector configured to receive illumination reflected from the edge of the sample along a collection path including one or more collection optics; at least one actuator mechanically coupled to the line scan detector and the one or more collection optics, the at least one actuator configured to actuate the line scan detector and the one or more collection optics radially along an actuation path defined by the edge of the sample; and a computing system communicatively coupled to the line scan detector, the computing system configured to generate at least one review image of at least a portion of the edge of the sample utilizing scan data associated with illumination received by the line scan detector from a plurality of locations along the edge of the sample.