发明名称 |
HOPPER AND THERMAL SPRAYING APPARATUS |
摘要 |
A hopper includes a container to contain a powdered material having a diameter of 0.1 through 10 micrometers, a pressure control part configured to create a periodic pressure difference inside the container, and a vibration exciter configured to vibrate the container. The container has a hole provided in a bottom thereof to feed the powdered material downward. |
申请公布号 |
US2014251212(A1) |
申请公布日期 |
2014.09.11 |
申请号 |
US201414187415 |
申请日期 |
2014.02.24 |
申请人 |
Tokyo Electron Limited |
发明人 |
KOBAYASHI Yoshiyuki;TAGA Satoshi |
分类号 |
B05B17/06 |
主分类号 |
B05B17/06 |
代理机构 |
|
代理人 |
|
主权项 |
1. A hopper comprising:
a container to contain a powdered material having a diameter of 0.1 through 10 micrometers, the container having a hole provided in a bottom thereof to feed the powdered material downward; a pressure control part configured to create a periodic pressure difference inside the container; and a vibration exciter configured to vibrate the container. |
地址 |
Tokyo JP |