| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing method which efficiently separates a support medium and a substrate from a lamination body.SOLUTION: A substrate processing method according to the invention includes: a cooling step where a lamination body 1 formed by laminating a substrate 11, an adhesive layer 13, and a support plate 12 in this order is cooled; and a support medium separation step where the support plate 12 is separated from the cooled lamination body 1 after the cooling step. |
