| 发明名称 |
MEMS VIBRATOR, METHOD OF MANUFACTURING MEMS VIBRATOR, ELECTRONIC DEVICE, AND MOVING OBJECT |
| 摘要 |
A MEMS vibrator includes an insulating portion, a first electrode provided on one surface of the insulating portion, a fixed portion, and a function portion, a second electrode provided so that at least a portion thereof overlaps the first electrode at a distance therefrom. The second electrode comes into contact with the function portion and extends from the fixed portion. |
| 申请公布号 |
US2014246737(A1) |
申请公布日期 |
2014.09.04 |
| 申请号 |
US201414191884 |
申请日期 |
2014.02.27 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
KINUGAWA Takuya;YAMADA Akinori |
| 分类号 |
B81B3/00;B81C1/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS vibrator comprising:
an insulating portion; a first electrode, a fixed portion, and a function portion which are provided above one surface of the insulating portion; and a second electrode which is provided so that at least a portion thereof overlaps the first electrode at a distance therefrom when seen in a plan view from a vertical direction to the one surface, wherein the second electrode comes into contact with the function portion, and extends from the fixed portion. |
| 地址 |
Tokyo JP |
