Continuous deposition apparatus

摘要

Provided is a continuous deposition apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed. The continuous deposition apparatus is provided with: a vacuum chamber (1); a deposition roller (2); evaporation sources (7L1, 7L2, 7R) which supply a deposition material to a film substrate from the side of the film substrate which is wound on the deposition roller and on which a coating is to be deposited; a feeding unit (3) which supplies the film substrate to the deposition roller (2); and a take-up unit (4) which takes up the film substrate after the coating is deposited thereon. The vacuum chamber (1) is provided with: an evaporation source opening for carrying out and carrying in the evaporation sources; evaporation source door sections (16L, 16R) which open and close the evaporation source opening; another opening provided for the substrate on which the coating is to be deposited, besides the evaporation source opening, for the purpose of carrying out and carrying in the feeding unit (3) and the take-up unit (4); and door sections (17L, 17R) which are provided for the substrate and open and close the opening provided for the substrate.

主权项

1. A continuous deposition apparatus for depositing a coating made of a deposition material on a surface of a film substrate on which the coating is to be deposited, comprising:
a vacuum chamber; a deposition roller provided in said vacuum chamber and rotatable about a horizontal axis, whereby the film substrate may be wound around the deposition roller with the width of the film substrate extending in the horizontal direction; an evaporation source of the deposition material for supplying and depositing the deposition material onto the film substrate wound around said deposition roller; a feeding unit rotatably arranged on the upper side of said deposition roller in said vacuum chamber, the feeding unit being provided for supplying the film substrate to said deposition roller; and a take-up unit rotatably arranged on the upper side of said deposition roller in said vacuum chamber, the take-up unit being provided for taking up the film substrate after the coating is deposited thereon, wherein said vacuum chamber has an evaporation source opening for carrying said evaporation source out of and into said vacuum chamber, an evaporation source door section for opening and closing the evaporation source opening, an opening for the film substrate provided at a separate position from the evaporation source opening, the opening for the substrate being provided for carrying said feeding unit and said take-up unit out of and into said vacuum chamber, and a door section for the substrate provided separately from the evaporation source door section, the door section for the substrate being provided for opening and closing the opening for the substrate, wherein said vacuum chamber is formed by an upper chamber having a bottom wall and containing therein said feeding unit and said take-up unit, and a lower chamber having a top wall and containing therein said deposition roller and said evaporation source, wherein said bottom wall of the upper chamber and said top wall of the lower chamber are different walls that are separated from each other, wherein said opening for the substrate and said door section for the substrate are provided in said upper chamber, and said evaporation source opening and said evaporation source door section are provided in said lower chamber, further comprising: an atmosphere separating section extending between said bottom wall of the upper chamber and said top wall of the lower chamber, and connecting said upper chamber and said lower chamber, wherein said atmosphere separating section forms a conveyance passage in a shape allowing conveyance of the film substrate before the coating is deposited thereon from the inside of said upper chamber to the inside of said lower chamber and conveyance of the film substrate after the coating is deposited thereon from the inside of said lower chamber to the inside of said upper chamber while separating the atmosphere between said upper chamber and said lower chamber.