| 摘要 |
PROBLEM TO BE SOLVED: To provide a surfactant which gives a coating composition having excellent levelling property, difficult to foam and defoaming in a short time even when the surfactant foams, and to provide a coating composition and a resist composition using the surfactant. ! SOLUTION: The surfactant includes: a fluorinated alkyl group (a1) in which fluorine atoms are directly bonded to a part or all of carbon atoms in an alkyl group and the number of carbon atoms directly bonded to a fluorine atom is 1 to 3; a fluorinated alkyl group (a2) in which fluorine atoms are directly bonded to a part or all of carbon atoms in an alkyl group and the number of carbon atoms directly bonded to a fluorine atom is 4 to 6; and a polyoxyalkylene chain (a3). The coating composition contains the surfactant, and the resist composition contains the surfactant. ! COPYRIGHT: (C)2014,JPO&INPIT |
