| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating and pressing device capable of easily managing heating temperature and directly and uniformly performing heating and pressing without using a bag for closing in a decompressed state to an electronic component.SOLUTION: A heating and pressing device 1000 comprises: an upper die 10 being a first pressing member; a lower die 12 being a second pressing member; and a cylinder device 92 ascending and descending the lower die 12. In the heating and pressing device 1000,: a pressing liquid 34 being a flowable fluid at normal temperature and keeping flowability at 430°C without chemical change such as thermal decomposition and the like is filled at the inside of the upper die 10; a pressing force uniforming member 6 formed with a thin film on a surface facing a material to be pressed is mounted inside; and a circulation line circulating the pressing liquid 34 between a heater 300 and the pressing force uniforming member 6. |
