发明名称 ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME
摘要 According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
申请公布号 US2014231934(A1) 申请公布日期 2014.08.21
申请号 US201313962885 申请日期 2013.08.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAITO Tomohiro
分类号 B81B7/00;B81C1/00 主分类号 B81B7/00
代理机构 代理人
主权项 1. An electrical component comprising: a substrate; a functional element formed on the substrate; a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to the substrate surface; and a second layer formed on the first layer and configured to close the through holes.
地址 Tokyo JP