| 发明名称 |
A BLOCK COPOLYMER FORMULATION AND METHODS RELATING THERETO |
| 摘要 |
<p>Provided is a block copolymer formulation including a block copolymer blend comprising a first poly(acrylate)-b-poly(silyl acrylate) block copolymer; and a second poly(acrylate)-b-poly(silyl acrylate) block copolymer. Also provided is a substrate processed with the block copolymer formulation.</p> |
| 申请公布号 |
KR20140101306(A) |
申请公布日期 |
2014.08.19 |
| 申请号 |
KR20140013461 |
申请日期 |
2014.02.06 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C.;DOW GLOBAL TECHNOLOGIES LLC |
发明人 |
HUSTAD PHILLIP;TREFONAS PETER;GU XINYU;CHANG SHIH WEI;GINZBURG VALERIY;VOGEL ERIN;MURRAY DANIEL |
| 分类号 |
C08L53/00;C08F220/10;C08F230/08;C08F297/00 |
主分类号 |
C08L53/00 |
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