Semiconductor device

摘要

Aspects of the invention can include a semiconductor device that includes an output stage IGBT and a Zener diode on the same semiconductor substrate. The IGBT can include a first p well layer, an n emitter region on the surface region of the first p well layer, a gate electrode deposited on a gate insulating film, and an emitter electrode on the emitter region. The Zener diode can include a p+ layer formed in the surface region of a second p well layer in the place different from the first p well layer and has a higher concentration than the second p well layer, an anode electrode in ohmic contact with the surface of the p+ layer, an n− layer having a lower concentration than the second p well layer, and a cathode electrode in Schottky contact with the surface of the n− layer.

主权项

1. A semiconductor device comprising:
an IGBT and a Zener diode that protects the IGBT from a surge voltage, the IGBT comprising:
a first well layer of a second conductivity type formed in a surface region of a first conductivity type semiconductor layer on a first principal surface of a second conductivity type semiconductor layer;an emitter layer of the first conductivity type selectively formed in a surface region of the first well layer;a gate electrode covering a part of surface of the emitter layer and a part of surface of the first well layer through a gate insulating film;an emitter electrode in contact commonly with the surface of the emitter layer that is not covered with the gate electrode and the surface of the first well layer; anda collector electrode in contact with a second principal surface of the second conductivity semiconductor layer; and the Zener diode comprising:
a second well layer of the second conductivity type formed in the surface region of the first conductivity type semiconductor layer on the first principal surface of the second conductivity type semiconductor layer, the second well layer being disposed apart from the first well layer;an anode electrode in ohmic contact with a surface of a second conductivity type layer that is in contact with the second well layer and has a higher impurity concentration than the second well layer; anda cathode electrode in Schottky contact with a surface of a first conductivity type layer that is formed in a surface region of the second well layer apart from the second conductivity type layer and has a lower impurity concentration than the second well layer; wherein the emitter electrode of the IGBT is connected to the anode electrode of the Zener diode.