| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a polishing device and a polishing method capable of accurately polishing side edges of a workpiece by a polishing unit since the workpiece can be transported without damaging front and rear sides of the workpiece and it is possible to prevent occurrence the workpiece from rolling at a time of this transportation.SOLUTION: A polishing device includes: a first gas permeable portion (first air permeable portion 10); and a second gas permeable portion (second air permeable portion 20) provided to face the first gas permeable portion, and provided to be distanced from this first gas permeable portion so as to form a workpiece transport region between the first and second gas permeable portions. Gas (compressed air) is supplied to the workpiece transport region via the first gas permeable portion and supplying the gas (compressed air) to the workpiece transport region via the second gas permeable portion, whereby the workpiece W is transported in a state of being distanced from each of the first gas permeable portion and the second gas permeable portion in the workpiece transport region.</p> |
