| 摘要 |
PROBLEM TO BE SOLVED: To provide an oscillation mirror element compatible with a high resonance frequency, without reducing the size of a mirror part. ! SOLUTION: An oscillation mirror element 1 comprises a mirror part 10 rotatable around a rotation axis line 200; a pair of horizontal driving parts 20a and 20b arranged to hold the mirror part 10 therebetween and deformed by the application of a voltage, to rotate the mirror part 10; and connection parts 31 and 32 which connect a pair of horizontal driving parts 20a and 20b to each other and between which the mirror part 10 is connected to a part between a pair of horizontal driving parts 20a and 20b. The mirror part 10, a pair of horizontal driving parts 20a and 20b, and the connection parts 31 and 32 include a common stainless base 1a made of metal. ! COPYRIGHT: (C)2014,JPO&INPIT |
