发明名称 DICING METHOD
摘要 The method comprises providing a substrate like a semiconductor wafer (1), applying a laser cut (4) of the substrate, and subsequently applying a saw to divide the substrate from a main surface (10). The laser cut (4) may be used to cut along boundaries of saw streets (7).
申请公布号 WO2014118035(A1) 申请公布日期 2014.08.07
申请号 WO2014EP51132 申请日期 2014.01.21
申请人 AMS AG 发明人 DRAXLER, WALTER
分类号 B28D5/00 主分类号 B28D5/00
代理机构 代理人
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