发明名称 Aerodynamic jetting of blended aerosolized materials
摘要 Method and apparatus for direct writing of passive structures having a tolerance of 5% or less in one or more physical, electrical, chemical, or optical properties. The present apparatus is capable of extended deposition times. The apparatus may be configured for unassisted operation and uses sensors and feedback loops to detect physical characteristics of the system to identify and maintain optimum process parameters.
申请公布号 US8796146(B2) 申请公布日期 2014.08.05
申请号 US201012720573 申请日期 2010.03.09
申请人 Optomec, Inc. 发明人 Renn Michael J.;King Bruce H.;Paulsen Jason A.
分类号 H01L21/311 主分类号 H01L21/311
代理机构 Peacock Myers, P.C. 代理人 Askenazy Philip D.;Peacock Myers, P.C.
主权项 1. A method for depositing blended materials, the method comprising the steps of: separately aerosolizing a plurality of materials comprising different values of a property; blending the aerosolized materials; focusing the aerosolized materials into at least one stream directed at a target; transporting the at least one stream to the target; depositing the blended materials in a desired pattern on the target; and continuously varying the relative amounts of the aerosolized materials during the depositing step, thereby varying a value of the property of the deposited blended materials such that the materials form a deposited structure comprising a plurality of values of the property.
地址 Albuquerque NM US