| 摘要 |
PURPOSE: An apparatus for processing a substrate is provided to reduce an installation space by installing a back door that slides upwards and downwards along a main body. CONSTITUTION: A chamber (112) is formed in a main body. A front door is installed on the front surface of the main body. The front door opens and closes a gate (114). A back door (120) is installed on the back surface of the main body and slides along the back surface. The back door opens and closes an opening part. |
