发明名称 |
DOPANT FEEDER FOR SINGLE CRYSTAL MANUFACTURING EQUIPMENT |
摘要 |
The present invention relates to a dopant feeder for a single crystal manufacturing apparatus that can input a low-melting-point dopant into silicon melt stably and uniformly even if the low-melting-point dopant is liquefied or gasified. The present invention provides a dopant feeder for a single crystal manufacturing apparatus, comprising: a crucible for containing silicon melt; a loader having a dopant to be doped with the silicon melt mounted thereon and including holes for guiding the liquefied dopant to flow down; a cover for accommodating the loader and guiding the dopant gasified from the loader into the silicon melt; and an elevation part for elevating the cover and the loader to approach the silicon melt at the side of the crucible. |
申请公布号 |
KR20140094803(A) |
申请公布日期 |
2014.07.31 |
申请号 |
KR20130007291 |
申请日期 |
2013.01.23 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
YOON, YONG KYOON;LEE, SANG JUN;KIM, JUNG RYUL |
分类号 |
C30B15/04;C30B29/06 |
主分类号 |
C30B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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