| 摘要 |
The present invention relates to a sliding backpressure shutoff valve capable of shutting off backpressure by quickly preventing the sudden inflow of atmospheric air or the reverse flow of a fluid from being generated in a piping system applied to a semiconductor manufacturing process for a semiconductor, an LCD, etc or a chemical manufacturing process and used for maintaining a regular pressure or the forward flow of the fluid such as gas. More specifically, the present invention relates to a sliding backpressure shutoff valve which comprises: a valve body having a fluid inlet, a fluid outlet, and a fluid path space part; a transfer body having a shutoff plate mounted thereon and capable of shutting of the flow of the fluid having the backpressure, and horizontally moved to the fluid path space part when the backpressure is shut off; and a transfer body moving unit moving the transfer body horizontally. The fluid space path of the valve according to the present invention does not have an obstacle normally, so the fluid can flow without interruption like in a straight pipe. But when the backpressure is generated in a pipe, the transfer body is horizontally moved to a shutoff position, and the shutoff plate mounted on the transfer body on the shutoff position is floated to shut off the flow of the fluid, thereby smoothly operating the valve according to the present invention even in a process in which powder is generated. |
