发明名称 FLUID CONTROL VALVE AND MASS FLOW CONTROLLER
摘要 The present invention relates to a fluid control valve with a configuration appropriate for reducing a volume in the fluid control valve. The fluid control valve (V) is constituted together with a valve body member (6) so that a measured flow rate measured when the fluid control valve is completely closed becomes zero within a short time. A notch (541) is formed at a part of a protruded part in order to be linked to a lower flow path as a valve sheet block (5) comprising a flow path (51) in the valve formed in the inside and a valve sheet plane (58) contacting a placement plane (62) of the valve body member (6).
申请公布号 KR20140090081(A) 申请公布日期 2014.07.16
申请号 KR20130164122 申请日期 2013.12.26
申请人 HORIBA STEC, CO., LTD. 发明人 HAYASHI SHIGEYUKI
分类号 F16K1/34;F16K7/16;F16K31/02 主分类号 F16K1/34
代理机构 代理人
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