| 摘要 |
The present invention relates to a manufacturing method for an indium-tin oxide (ITO) film. The present invention provides the manufacturing method for the ITO film, which comprises a first step of treating a surface of a high polymer substrate; a second step of forming an under coating layer on the surface-treated high polymer substrate; a third step of forming an ITO thin film by using a roll-to-roll sputter to sputter an ITO target; and a fourth step of removing nodules generated on a surface of the ITO target after sputtering the ITO target, wherein the roll-to-roll sputter in the third step has three cathodes installed thereon to form the ITO thin film. According to the present invention, the manufacturing method is capable of reducing manufacturing process time by increasing the number of ITO cathodes and effectively removing the nodules generated on the surface of the ITO target when the ITO thin film is formed by using the roll-to-roll sputter, and improving green productivity by performing continuous mass production and reducing raw materials such as the ITO target. |
