MICROWAVE PLASMA GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a microwave plasma generation device capable of generating stable microwave plasma even under low pressure.SOLUTION: A microwave plasma generation device 10 generates microwave plasma within a vacuum container. The microwave plasma generation device 10 comprises: a first waveguide 20 for transmitting a microwave; a plasma generation section 40 including a tube body part 41 in which the microwave is propagated and which includes a slot antenna 42 with which a plurality of slots 420 are formed to pass the microwave in an inside direction of the vacuum container, and a tube body inside dielectric 43 disposed inside of the tube body part 41 so as to cover at least the slots 420; and a second waveguide 30 interposed between the first waveguide 20 and the plasma generation section 40 and including a dielectric 31 of which the refraction factor is smaller than that of the tube body inside dielectric 43 and which is disposed in contact with the tube body inside dielectric 43.