| 摘要 |
An apparatus for measuring electromagnetic waves of the present invention comprises an electromagnetic wave output device, an electromagnetic wave detector, a frequency component acquisition unit, a thickness and amplitude characteristic record unit and an indicating content extraction unit. According to the apparatus for measuring electromagnetic waves, the electromagnetic wave output device is arranged on a substrate and outputs electromagnetic waves with frequency of 0.01-100 [THz] towards an object having at least two layers. The electromagnetic wave detector detects substrate surface reflected electromagnetic waves which are irradiated on the object, are reflected by the substrate and transmit the object. The frequency component acquisition unit obtains the thickness of the frequency components of the substrate surface reflected electromagnetic waves detected by the electromagnetic wave detector. The thickness and amplitude characteristic record unit records relation between a thickness indicating content indicating the thickness of at least one layer among the object, and the amplitude of the frequency components of the substrate surface reflected electromagnetic waves. The thickness indicating content extraction unit draws the thickness indicating ingredient by being based on the amplitude of the frequency components of the substrate surface reflected electromagnetic waves obtained by the frequency component acquisition unit and the records of the thickness and amplitude characteristic record unit. |
