Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed

摘要

An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.

主权项

1. An electromechanical transducer comprising:
a plurality of elements, each element including:
a first electrode;a vibrating membrane formed above the first electrode through a cavity;a supporting unit formed to support the vibrating member; anda second electrode formed on the vibrating membrane; and an insulating protective layer formed to cover at least a whole area of a surface of the second electrode and wiring of the second electrode, wherein the vibrating membrane, the supporting unit and the insulating protective layer comprise silicon nitride film, wherein the plurality of elements include a first element and a second element adjacent to each other, wherein there is a region, between the supporting unit of the first element and the supporting unit of the second element, where the insulating protective layer is not formed, and wherein a thickness of the silicon nitride film at the region is thinner than a thickness of the silicon nitride film above the cavity, which corresponds to a combined thickness of the vibrating membrane under the second electrode and the insulating protective layer above the second electrode.