Substrate processing apparatus,申请号KR20110011079U-传众专利搜索

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发明名称	Substrate processing apparatus
摘要
申请公布号	KR200473165(Y1)	申请公布日期	2014.06.16
申请号	KR20110011079U	申请日期	2011.12.14
申请人		发明人
分类号	C23C16/458;H01L21/205;H01L21/683	主分类号	C23C16/458
代理机构		代理人
主权项
地址

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