PARTICLE BEAM FORMING DEVICE

摘要

Provided is a particle beam forming device capable of forming a particle beam, and evaluating and controlling the spatial distribution of the formed particle beam. A particle beam forming device forms a linear or conical particle beam from a particle source in which particles are dispersed in gas, and is provided with: a reduced-pressure container (12) in which the pressure is reduced; a particle beam production means (3) which has one end disposed outside the reduced-pressure container (12) and the other end disposed within the reduced-pressure container (12), takes in the particle source (2) outside the reduced-pressure container (12), and introduces the particle beam into the reduced-pressure container (12); and a particle beam evaluation means which evaluates the spatial distribution of the particle beam within the reduced-pressure container (12). It is preferable that the particle beam evaluation means be provided with: a light application means for applying light to the particle beam; a scattered light detection means (14) for detecting scattered light generated by the light applied to the particle beam hitting the particles; and a signal processing means (15) for recording and processing a signal outputted from the scattered light detection means (14), the signal corresponding to the intensity and/or frequency of the scattered light.