等离子反应内室之侧部气体喷射器,申请号TW099132297-传众专利搜索

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发明名称	等离子反应内室之侧部气体喷射器
摘要
申请公布号	TWI441255	申请公布日期	2014.06.11
申请号	TW099132297	申请日期	2010.09.24
申请人	ＤＭＳ有限公司南韩	发明人	金珉植;高诚庸;蔡焕国;朴根周;金　起铉;李元默
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人	赖国榕台北市信义区永吉路168号4楼
主权项
地址	南韩

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