发明名称 METHODS OF FABRICATING SEMICONDUCTOR DEVICES
摘要 <p>Disclosed is a method for fabricating a semiconductor device. A landing pad is formed. A stopping insulating layer is formed on the landing pad. A lower molding layer including a first material is formed on the stopping insulating layer. An upper molding layer including a second material, which is different from the first material, is formed on the lower molding layer. A hole is formed vertically through the upper and lower molding layers to expose the landing pad. A first electrode is formed in the hole. The upper molding layer is removed to expose a portion of a surface of the first electrode. The lower molding layer is removed to expose another portion of the surface of the first electrode. A dielectric layer is formed on the exposed portions of the surface of the first electrode. A second electrode is formed on the dielectric material.</p>
申请公布号 KR20140070140(A) 申请公布日期 2014.06.10
申请号 KR20120138254 申请日期 2012.11.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SEO, JUNG WOO
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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