System and method for pedestal adjustment

摘要

A pedestal positioning assembly system for use in a substrate processing system includes a pedestal rigidly attached to a pedestal shaft, a reference rigidly attached to the substrate processing system, a lateral adjustment assembly to adjust a lateral location of the pedestal relative to the reference, and a vertical adjustment assembly to adjust a tilt of the pedestal relative to the reference. The lateral adjustment assembly and the vertical adjustment assembly are external to a processing chamber and are coupled to the pedestal disposed within the processing chamber through the pedestal shaft. The reference can be a ring and the lateral adjustment assembly substantially centers the pedestal within the ring. A method of adjusting a pedestal includes leveling the pedestal, translating the pedestal, calibrating the pedestal height to a preheat ring level, and checking the level and location of the pedestal while rotating the pedestal.

主权项

1. A substrate processing system, comprising:
a processing chamber; a pedestal disposed within the processing chamber; a lateral adjustment assembly, coupled to the pedestal and external to the processing chamber, to change a lateral centrality of the pedestal, wherein the lateral adjustment assembly comprises:
an outer ring rigidly coupled externally to the processing chamber;three or more adjustment screws spaced nearly equally around the outer ring, wherein the three or more adjustment screws comprises bored out interiors and one or more external threaded regions, the one or more external threaded regions comprising a first external threaded region with a first thread pitch to mate the three or more adjustment screws with the outer ring;an adjustable support ring to adjust a spacing between the pedestal and the outer ring; anda threaded rod with a rod thread pitch to mate with the bored out interiors of the three or more adjustment screws and with the adjustable support ring, wherein the rod thread pitch is different from the first thread pitch of the first external threaded region of the three or more adjustment screws; and a vertical adjustment assembly, coupled to the pedestal and external to the processing chamber, to change a tilt of the pedestal, wherein the lateral centrality and the tilt of the pedestal are adjusted independently.