Silver alloy electrical lapping guides (ELGs) for fabrication of disk drive sliders with magnetoresistive sensors

摘要

An air-bearing slider used in a magnetic recording disk drive has a surface that supports a magnetoresistive (MR) read head or sensor and an electrical lapping guide (ELG) adjacent to the MR sensor. The ELG is formed of a different material than the MR sensor so as to have both a high electrical resistivity and a substantially higher etch rate. When the ELG and MR sensor are etched simultaneously to form their respective back edges, the ELG will have a sharp well-defined non-tapered wall at the back edge. The ELG has a film thickness close to but generally thinner than that of the MR sensor, and a sheet resistance to generally match the resistance measurement capability of the lapping tool. The preferred material for the ELG is an alloy comprising silver (Ag) and one or more of Sn, Ge and zinc Zn.

主权项

1. An air-bearing slider that supports a read/write head in a magnetic recording disk drive, the slider having a generally planar upper surface and an air-bearing surface (ABS) generally orthogonal to said upper surface, the slider comprising:
a magnetoresistive sensor directly on the upper surface, the sensor being formed of a stack of multiple layers and having a front edge at the ABS and a back edge recessed from said sensor front edge, the sensor back edge having a planar portion generally parallel to the sensor front edge and substantially orthogonal to the upper surface and a tapered portion nonparallel to the sensor front edge and the upper surface and connecting the upper surface to the planar portion of the sensor back edge; and an electrical lapping guide (ELG) on the upper surface adjacent to the sensor and having a front edge at the ABS and a back edge generally parallel to and recessed from said ELG front edge and substantially orthogonal to the upper surface, the ELG being formed of an alloy comprising Ag and one or more of Sn, Ge and Zn.