发明名称 |
FABRICATION METHOD OF ORGANIC THIN-FILM TRANSISTOR USING RADIATION-BASED GRAPHENE ELECTRODE WITH HIGH-WORK FUNCTION AND THE ORGANIC THIN-FILM TRANSISTOR THEREBY |
摘要 |
The present invention provides a method for manufacturing an organic thin-film transistor using a radiation-based graphene electrode with a high work function. The method comprises: a first step of forming a pattern of a polymer film by selectively irradiating an upper part of a substrate; a second step of forming a source-drain graphene electrode by carbonizing the pattern formed in the first step; a third step of forming an organic semiconductor layer on an upper part of the source-drain graphene electrode formed in the second step; a fourth step of forming an organic insulating layer on an upper part of the organic semiconductor layer formed in the third step; and a fifth step of forming a gate electrode on an upper part of the organic insulating layer formed in the fourth step. The method for manufacturing an organic thin-film transistor according to the present invention can easily manufacture a high conductivity graphene electrode with a high work function in various forms (shapes and sizes) at much lower manufacturing costs without requiring an additional etching process, unlike an existing chemical vapor deposition using a metal catalyst, and can give performance equal or superior to that of an organic thin-film transistor using an expensive metal electrode (gold, platinum, etc.) as a source-drain electrode. |
申请公布号 |
KR101400894(B1) |
申请公布日期 |
2014.05.30 |
申请号 |
KR20130053317 |
申请日期 |
2013.05.10 |
申请人 |
KOREA ATOMIC ENERGY RESEARCH INSTITUTE |
发明人 |
JUNG, CHAN HEE;HWANG, IN TAE;JUNG, CHANG HEE;KANG, PHIL HYUN |
分类号 |
H01L51/40;H01L51/30 |
主分类号 |
H01L51/40 |
代理机构 |
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地址 |
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