发明名称 GRINDING APPARATUS
摘要 The purpose of the present invention is to easily perform a separating work of a grinding wheel. A grinding separating unit (30) comprises; a first inlet pipe (31) which passes through the inner side of a rotary shaft (24) in a longitudinal direction; a second inlet pipe (32) which is connected to the first inlet pipe (31) and is connected to a inlet (201) which is arranged on a mounting surface (200) of a wheel mount (23); and a guide unit (37) which guides a grinding wheel (22) and an inlet valve (33) which converts the absorption from the inlet (201) and the prevention of the absorption to a predetermined position. The grinding separating unit (30) guides and maintains that the grinding wheel (22) is not dislocated to the mounting surface (200) of the wheel mount (23) through the guide unit (37) by opening the inlet valve (33). Therefore, the separating work of the grinding wheel (22) is easily performed without a screw.
申请公布号 KR20140065331(A) 申请公布日期 2014.05.29
申请号 KR20130127072 申请日期 2013.10.24
申请人 DISCO CORPORATION 发明人 TAKADA NOBUYUKI
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址
您可能感兴趣的专利