Manipulator for the dynamic positioning of a substrate, coating method and the use of a manipulator

摘要

The component manipulator (1) has a main structure comprising a main drive axle (30) that is rotatable about a main rotation axis (3). A ceramic coupling element (4) is provided in main structure for connecting with a substrate holder (5). The ceramic coupling element is connected to a connecting segment (51) of substrate holder by plug-turning connection. The substrate holder is arranged to rotate about a connecting axis (V) of plug-turning connection. Independent claims are included for the following: (1) coating method of substrate; and (2) coating device of substrate.