发明名称 POLISHING COMPOSITION
摘要 Provided is a polishing composition which has good storage stability and can polish an object having poor chemical reactivity at a high speed. The present invention is a polishing composition which comprises a silica having an organic acid immobilized on the surface thereof, a dihydric alcohol having a molecular weight of less than 20,000 and a pH-adjusting agent, and which has a pH value of 6 or less.
申请公布号 WO2014077107(A1) 申请公布日期 2014.05.22
申请号 WO2013JP78967 申请日期 2013.10.25
申请人 FUJIMI INCORPORATED 发明人 YOKOTA, SHUUGO;SAKABE, KOICHI
分类号 H01L21/304;B24B37/00;C09K3/14 主分类号 H01L21/304
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