发明名称 |
Method and apparatus for laser machining relatively narrow and relatively wide structures |
摘要 |
The method uses a common optical, system and sequentially creates structures of different sizes in a polymer substrate by means of different laser processes is described. One process uses a laser beam that is tightly focussed on the substrate surface and is used for creating fine groove structures by semi-continuous direct write type beam movement. The second process uses a second laser beam that is used to form a larger size image on the substrate surface and is used to create blind pads and contact holes in the substrate in step and drill mode. A third optional process uses the second laser beam operating in direct writing mode to remove layers of the substrate over larger continuous areas or in a mesh type pattern. |
申请公布号 |
US8729426(B2) |
申请公布日期 |
2014.05.20 |
申请号 |
US200913139136 |
申请日期 |
2009.05.27 |
申请人 |
RUMSBY PHILIP THOMAS;M-SOLV LTD. |
发明人 |
RUMSBY PHILIP THOMAS |
分类号 |
B23K26/06;B23K26/067;H01K3/10;H05K3/06 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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