| 摘要 |
The present invention relates to an apparatus for cleaning an LCD glass substrate including a cassette loading part, multiple alkali vessels, a deionized water cleaning vessel and a cassette unloading part. The alkali vessel is installed with a cleaning solution circulating device for circulating an alkali aqueous solution forcibly from the top to the bottom, a cleaning solution heating unit for heating the alkali aqueous solution and an overflow recovery device for removing bubbles generated in the alkali vessel. The present invention circulates the alkali aqueous solution in the alkali vessel using a circulation pump and also removes the generated bubbles through the overflow recovery device, and can improve detergency of the LCD glass substrate by heating the alkali aqueous solution by a fixed temperature using the cleaning solution heating unit. The present invention also can minimize defects such as protrusion defects in foreign substances of the LCD glass substrate in etching the LCD glass substrate, and can increase marketability by increasing etching uniformity. The present invention also has eco-friendly effect by reducing generation of a wasted alkali solution maximally, by filtering the foreign substances in the alkali solution and reusing the alkali solution by adding a recycling system. |
