| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of preventing the metal contamination of polysilicon by providing the surface of a metallic member in contact with polysilicon with a cover made of a resin, in which the surface exposure of the metal caused by the wear of the cover can be securely prevented.SOLUTION: In the method for preventing the metal contamination of polysilicon caused by the contact between the polysilicon and a metallic member in contact with the polysilicon by providing the surface of the metallic member with a cover made of a resin, as the cover 3 made of a resin, the one in which two resin sheets 3a, 3b are provided in a superimposed way, and, as the two resin sheets, the ones with mutually different color tones are used.</p> |
