发明名称 MULTI-LAYER COATING WITH CUBIC BORON NITRIDE PARTICLES
摘要 A physical configuration of multiple-layer coatings formed with at least one layer of coating containing cubic born nitride (cBN) particles with one or more layers in composite form containing cBN particles may have a thickness of each individual layer as thin as in the nanometer range, or as thick as in the range of a few microns and even up to tens of microns. The chemistry of the composite layer consists of any individual phase of (a) nitrides such as titanium nitride (TiN), titanium carbonitride (TiCN), and hafnium nitride (HfN); (b) carbides such as titanium carbide (TiC); and (c) oxides such as aluminum oxide (AI2O3) or any combination of the above phases, in addition to cBN particles. The coating or film can be stand-alone or on a substrate.
申请公布号 WO2012166747(A3) 申请公布日期 2014.05.08
申请号 WO2012US39894 申请日期 2012.05.29
申请人 NANOMECH INC.;THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ARKANSAS;JIANG, WENPING;MALSHE, AJAY, P. 发明人 JIANG, WENPING;MALSHE, AJAY, P.
分类号 H01L21/302 主分类号 H01L21/302
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