发明名称 |
MANUFACTURING METHOD OF METAL IMPREGNATED ACTIVE CARBON FIBER FOR TARGET SOLVENT VOC KILLING |
摘要 |
The present invention relates to a manufacturing method of an active metal impregnated active carbon fiber for a target solvent capable of adsorbing and catalytically decomposing a target solvent such as acetone, benzene, and ethylene glycol which are used in a diffusion process or a washing process for manufacturing a semiconductor or an LCD by impregnating an active carbon fiber with an active metal. |
申请公布号 |
KR20140052752(A) |
申请公布日期 |
2014.05.07 |
申请号 |
KR20120119279 |
申请日期 |
2012.10.25 |
申请人 |
KIYEON E&C CO., LTD. |
发明人 |
KIM, TAE WON;KIM, KWANG SU;CHOI, KANG YONG |
分类号 |
D06M11/49;D06M11/83;D06M101/40 |
主分类号 |
D06M11/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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