摘要 |
<p>PROBLEM TO BE SOLVED: To refine an ingot by that contaminant is removed from silicon sludge generated at slice working of silicon.SOLUTION: A contaminant removing furnace includes: a first crucible that includes a first filter, and stores silicon sludge; a first heater that heats the first crucible; a second crucible that includes a second filter, and stores a silicon molten liquid that penetrates the first filter; a second heater that heats the second crucible; and a third crucible that stores a silicon molten liquid that penetrates the second filter, wherein a filter particle degree of the first filter is larger than a filter particle degree of the second filter.</p> |