| 摘要 |
PROBLEM TO BE SOLVED: To provide a layered heating element capable of reducing temperature variations in a surface thereof, an electrostatic chuck, and a ceramic heater.SOLUTION: A layered heating element 1 includes: a body part 3 formed by laminating a plurality of layers comprising ceramic; heaters 5, 7 embedded in the body part 3; terminals 11, 13, 15, 17 mounted on one end of the body part 3 in the thickness direction; and power feeding paths 19, 21, 23, 25, 27 feeding power to the heaters 5, 7 through the terminals. The power feeding paths are formed of the combination of a plurality of conductive layers X, Y provided in the body part 3 and a plurality of through vias α, &bgr;, γ. The plurality of through vias α, &bgr;, γ include through vias α, &bgr;, γ defined below, and the through via α is located between the through via &bgr; and the through via γ, or at a position overlapping with the through via &bgr; or the through via γ. Through via α: a through via connecting the conductive layer X adjacent to the heaters 5, 7 and the heaters 5, 7. Through via &bgr; and through via γ: a through via connecting the conductive layer Y and the conductive layer X. |
