| 摘要 |
The present invention relates to a multi-layer thickness measurement device using a camera and a tunable laser and, more specifically, to a multi-layer thickness measurement device using a camera and a tunable laser to measure the total area of a large scale sample comprised of multi-layer (an LCD panel, AMOLED, FPD, or a special purpose multi-layer film, etc.) without Z motion setting, whereby it provides an effect of measuring the total area of a large scale sample comprised of a multi-layer (an LCD panel, AMOLED, FPD, or a special purpose multi-layer film, etc.) without Z motion setting. [Reference numerals] (100) Swept laser; (200) OCT scanner unit; (310) Image acquisition unit; (320) Image processing unit; (330) Measurement test result display unit; (410) Wave variation control unit; (420) Transportation means control unit; (500) Transportation means |
