Sensor apparatus and robot apparatus

摘要

To well remove a noise component due to vibration of a flexible member from an original detection signal output from a detecting unit and suppress a phase delay of a detection signal obtained by filtering. For this purpose, the present invention provides a detecting unit including a flexible member deforming according to a state of an object to be measured and a sensor detecting an amount of deformation of the flexible member and outputting an original detection signal indicating a detection result. A filtering unit outputs a detection signal obtained by filtering the original detection signal using a filter coefficient. A calculating device calculates a vibration frequency of the flexible member contained in the original detection signal. A changing unit changes a filter coefficient of the filtering unit to cause the filtering unit to function as a filter for attenuating the vibration frequency calculated by the calculating device.