| 摘要 |
PROBLEM TO BE SOLVED: To provide a composition for forming an immersion overlay film which exhibits high water repellency as well as superior peeling resistance.SOLUTION: The composition for forming an immersion overlay film comprises [A] a polymer component including a polymer (a) having a structural unit expressed by formula (1) and [B] a solvent. In formula (1), Rrepresents a carboxyl group or a group expressed by formula (2); and Rrepresents a hydrocarbon group with a valence of (n+1) having 1 to 20 carbon atoms, a fluorinated hydrocarbon group with a valence of (n+1) having 1 to 20 carbon atoms, or a group including at least one selected from the group consisting of -CO-, -COO-, -O-, -NR'-, -CS-, -S-, -SO- and -SO- in a carbon-carbon bond of the above hydrocarbon group or the fluorinated hydrocarbon group. |
