发明名称 Multilayered wiring board and production method thereof
摘要 There are provided a multilayered wiring board for a wafer batch contact board and production method thereof which can form condensers at low costs without changing the volume of the board (area and height, particularly height). The multilayered wiring board is a multilayered wiring board which constitutes a portion of a wafer batch contact board or the like used for testing a plurality of semiconductor devices formed on a wafer simultaneously and which has the structure that wiring patterns laminated via an insulating layer are connected (or conducted) to each other via a contact hole formed in the insulating layer, wherein condensers 11 are formed between the wiring patterns in the multilayered wiring layer integrally.
申请公布号 US2002084456(A1) 申请公布日期 2002.07.04
申请号 US20010948964 申请日期 2001.09.07
申请人 HOYA CORPORATION 发明人 SUGIHARA OSAMU;ASAKAWA TSUTOMU
分类号 G01R31/26;G01R1/073;G01R31/02;G01R31/28;H01L21/66;H05K1/16;H05K3/46;(IPC1-7):H01L21/66;H01L23/58;H01L29/40 主分类号 G01R31/26
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