TEACHING METHOD FOR SAMPLE TRANSFER APPARATUS

摘要

PROBLEM TO BE SOLVED: To perform teaching for a transfer robot quickly and efficiently.SOLUTION: A teaching method for a sample transfer apparatus includes the steps of: arranging a sample so that the center of the sample corresponds to the center of a stage disposed in a processing chamber or an intermediate chamber or a lock chamber; receiving the sample by extending a transfer arm; contracting the transfer arm to return to a predetermined position while holding the received sample; detecting passage timing of the sample when the sample being held is transferred, by using a plurality of sensors arranged in first and second transfer chambers, to obtain a center position of the sample and a deviation amount of the sample on the transfer arm from a reference position; returning the sample to an original position of the stage; correcting receiving position data of the sample on the basis of the deviation amount of the center of the sample; and determining whether the deviation amount of the center of the sample is within an allowable range. The above steps are repeated until the deviation amount is within the allowable range.