| 摘要 |
<p>A processing system, comprising: an annular piping which extends annularly, in particular in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region; wherein the annular piping comprises on a side, which faces the interaction region, a plurality of exit openings for the gas towards the interaction region; and wherein the annular piping comprises a holder, which is configured to pivot the annular piping about a pivot axis, which is parallel to the tilt axis of the object holder.</p> |
