SUBSTRATE TRANSFER APPARATUS, SUBSTRATE WORKING APPARATUS, AND TRANSFER BELT

摘要

A substrate transferring apparatus includes a guide member which is extended in a transfer direction and includes a guide surface which is in contact with the outside of a substrate in a direction which is perpendicular to the transfer direction, a conveyor belt which is extended in the transfer direction and supports the end of the substrate in the perpendicular direction, and a driving unit which moves the conveyor belt. The conveyor belt includes a belt base part which is located under the guide member and is extended on both sides of the perpendicular direction from the location of the guide surface and a protrusion part which is upwardly extended from the belt base part to a location between the upper and lower ends of the guide surface. The conveyor belt supports the substrate by the protrusion part.