发明名称 |
Appearance inspection apparatus |
摘要 |
An appearance inspection apparatus analyzes a difference in detection characteristics of detection signals obtained by detectors to flexibly meet various inspection purposes without changing a circuit or software. The apparatus includes a signal synthesizing section that synthesizes detection signals from the detectors in accordance with a set condition. An input operating section sets a synthesizing condition of the detection signal by the signal synthesizing section, and an information display section displays a synthesizing map structured based on a synthesized signal which is synthesized by the signal synthesizing section in accordance with a condition set by the input operating section. |
申请公布号 |
US8699017(B2) |
申请公布日期 |
2014.04.15 |
申请号 |
US201313886302 |
申请日期 |
2013.05.03 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
OKA KENJI;MATSUI SHIGERU |
分类号 |
G01N21/00;G01N21/95;G01N21/956 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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