发明名称 INTEGRATED CIRCUIT TRANSISTOR STRUCTURE WITH HIGH GERMANIUM CONCENTRATION SiGe STRESSOR
摘要 An integrated circuit transistor structure includes a semiconductor substrate, a first SiGe layer in at least one of a source area or a drain area on the semiconductor substrate, and a channel between the source area and the drain area. The first SiGe layer has a Ge concentration of 50 percent or more.
申请公布号 US2014091362(A1) 申请公布日期 2014.04.03
申请号 US201314102702 申请日期 2013.12.11
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHANG CHIH-HAO;XU JEFF J.;WANG CHIEN-HSUN;YEH CHIH CHIEH;CHANG CHIH-HSIANG
分类号 H01L29/78 主分类号 H01L29/78
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