| 摘要 |
<p>The present invention prevents contaminants from transferring from a gripping hand and thereby contaminating a substrate case after said substrate case is cleaned. In the present invention, a substrate case (C) for accommodating a substrate is cleaned, with no substrate inside, by a substrate-case cleaning device provided with a booth (10) that forms a clean space. Cleaning tanks (40, 50) that contain and clean disassembled components of the substrate case (C) are provided inside said booth (10). The substrate-case cleaning device is also provided with a conveyance mechanism (60) whereby the components of the substrate case (C) are gripped by a gripping hand (70) and conveyed to the cleaning tanks (40, 50). While the substrate case (C) is being cleaned, the gripping hand (70) is kept at a standby position (Q) inside the booth (10), and the substrate-case cleaning device is provided with a cleaning means (80) that cleans the gripping hand (70) while the abovementioned components are being cleaned. Said cleaning means (80) comprises the following: a spray nozzle (81) that sprays a gas at the gripping hand (70); and an exhaust fan (82) that removes said gas from the interior of the booth (10).</p> |
