| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a corrosion-resistant member capable of reducing particles produced by the use in a halogen-based corrosive gas and halogen-based gas plasma. <P>SOLUTION: In the corrosion-resistant member, the surface to be exposed to the halogen-based corrosive gas, the halogen type gas plasma or the like, such as the inside of semiconductor manufacturing equipment, the inside of a flat panel display manufacturing apparatus or the inside of a solar cell manufacturing apparatus, is formed of a thermally sprayed film formed according to a thermal spraying method and a gadolinium oxide sol-gel film formed according to a sol-gel method. <P>COPYRIGHT: (C)2010,JPO&INPIT |
